Substrate impact on threshold voltage and subthreshold...

Solid-State Electronics 2010 Vol. 54; Iss. 2

Substrate impact on threshold voltage and subthreshold slope of sub-32 nm ultra thin SOI MOSFETs with thin buried oxide and undoped channel

S. Burignat, D. Flandre, M.K. Md Arshad, V. Kilchytska, F. Andrieu, O. Faynot, J.-P. Raskin
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Volume:
54
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.sse.2009.12.021
File:
PDF, 981 KB
english, 2010
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