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Hardness and elastic modulus of amorphous and nanocrystalline SiC and Si films
V. Kulikovsky, V. Vorlíček, P. Boháč, M. Stranyánek, R. Čtvrtlík, A. Kurdyumov, L. JastrabikVolume:
202
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.surfcoat.2007.07.029
File:
PDF, 660 KB
english, 2008