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Characteristics of poly-Si TFT combined with nonvolatile SONOS memory and nanowire channels structure
Shih-Ching Chen, Ting-Chang Chang, Po-Tsun Liu, Yung-Chun Wu, Po-Shun Lin, Shih-Cheng Chen, Jing-Yi Chin, S.M. Sze, Chun-Yen Chang, Chen-Hsin LienVolume:
202
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2007.07.111
File:
PDF, 762 KB
english, 2007