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Electrical characteristics of arc-free high-power pulsed sputtering glow plasma
K. Yukimura, R. Mieda, H. Tamagaki, T. OkimotoVolume:
202
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2008.06.021
File:
PDF, 796 KB
english, 2008