Two-step reactive sputtering of piezoelectric AlN thin...

Two-step reactive sputtering of piezoelectric AlN thin films

J.S. Cherng, C.M. Lin, T.Y. Chen
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Volume:
202
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2008.06.087
File:
PDF, 474 KB
english, 2008
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