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Mechanical properties of TaN-Cu nanocomposite thin films
J.H. Hsieh, P.C. Liu, C. Li, M.K. Cheng, S.Y. ChangVolume:
202
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2008.06.131
File:
PDF, 900 KB
english, 2008