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Nano-cell fabrication on semiconductor utilizing self-organizational behavior of point defects induced by ion beam
Noriko Nitta, Sayo Morita, Masafumi TaniwakiVolume:
203
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2009.02.113
File:
PDF, 1.94 MB
english, 2009