Effects of capacitively-coupled radio-frequency discharge...

Surface and Coatings Technology 2009 Vol. 203; Iss. 17-18

Effects of capacitively-coupled radio-frequency discharge on operation voltage in magnetron sputtering

Chunzhi Gong, Xiubo Tian, Muqin Li, Shiqin Yang, Ricky K.Y. Fu, Paul K. Chu
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Volume:
203
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2009.02.125
File:
PDF, 717 KB
english, 2009
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