Synchronous plasma enhancement in RF-driven plasma source...

Surface and Coatings Technology 2009 Vol. 203; Iss. 19

Synchronous plasma enhancement in RF-driven plasma source for ion implantation

C. Diplasu, A. Surmeian, A. Groza, M. Ganciu
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Volume:
203
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2009.02.137
File:
PDF, 649 KB
english, 2009
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