On the film density using high power impulse magnetron...

Surface and Coatings Technology 2010 Vol. 205; Iss. 2

On the film density using high power impulse magnetron sputtering

Mattias Samuelsson, Daniel Lundin, Jens Jensen, Michael A. Raadu, Jon Tomas Gudmundsson, Ulf Helmersson
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Volume:
205
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2010.07.041
File:
PDF, 642 KB
english, 2010
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