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High rate deposition of thick CrN and Cr2N coatings using modulated pulse power (MPP) magnetron sputtering
Jianliang Lin, William D. Sproul, John J. Moore, Sabrina Lee, Sterling MyersVolume:
205
Year:
2011
Language:
english
Pages:
9
DOI:
10.1016/j.surfcoat.2010.11.039
File:
PDF, 846 KB
english, 2011