Plasma diagnostics for pulsed-dc plasma-polymerizing para-xylene using QMS and OES
Chia-Man Chou, Chih-Cheng Chuang, Chia-Hao Lin, Chi-Jen Chung, Ju-Liang HeVolume:
205
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2011.04.074
File:
PDF, 1.23 MB
english, 2011