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Reaction of cyanide ions with copper on Si surfaces and its use for Si cleaning
Yueh-Ling Liu, Naozumi Fujiwara, Hitoo Iwasa, Masao Takahashi, Shigeki Imai, Hikaru KobayashiVolume:
600
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.susc.2006.01.017
File:
PDF, 150 KB
english, 2006