Chemistry and formation process of Ga(Al)As oxide during local anodic oxidation nanolithography
M. Lazzarino, G. Mori, L. Sorba, D. Ercolani, G. Biasiol, S. Heun, A. LocatelliVolume:
600
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.susc.2006.01.086
File:
PDF, 470 KB
english, 2006