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Fabrication and analysis of buried iron silicide microstructures using a focused low energy electron beam
Youhei Kakefuda, Yoshiyuki Yamashita, Kozo Mukai, Jun YoshinobuVolume:
601
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.susc.2007.04.148
File:
PDF, 434 KB
english, 2007