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Nitrogen effect on the electrical properties of CNx thin films deposited by reactive magnetron sputtering
N.E. Derradji, M.L. Mahdjoubi, H. Belkhir, N. Mumumbila, B. Angleraud, P.Y. TessierVolume:
482
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2004.11.137
File:
PDF, 345 KB
english, 2005