Characterizations of CNx thin films made by ionized physical vapor deposition
F. Tétard, P. Djemia, M.P. Besland, P.Y. Tessier, B. AngleraudVolume:
482
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.11.172
File:
PDF, 320 KB
english, 2005