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A novel two-step MOCVD for producing thin copper films with a mixture of ethyl alcohol and water as the additive
Hsin-Hung Lee, Chiapyng Lee, Yu-Lin Kuo, Yee-Wen YenVolume:
498
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2005.07.060
File:
PDF, 516 KB
english, 2006