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Oxide-mediated formation of epitaxy silicide on heavily doped Si surfaces and narrow width active region
Yen-Ming Chen, George C. Tu, Ying-Lang WangVolume:
498
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2005.07.075
File:
PDF, 135 KB
english, 2006