Nano-structure in micro-crystalline silicon thin films studied by small-angle X-ray scattering
Bingqing Zhou, Fengzhen Liu, Jinhua Gu, Qunfang Zhang, Yuqin Zhou, Meifang ZhuVolume:
501
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2005.07.135
File:
PDF, 119 KB
english, 2006