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Enhancement of moisture resistance of spin-on low-k HSQ films by hot wire generated atomic hydrogen treatment
Alka A. Kumbhar, Sunil Kumar Singh, R.O. DusaneVolume:
501
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2005.07.214
File:
PDF, 134 KB
english, 2006