Potential of Cat-CVD deposited a-SiC:H as diffusion barrier...

Potential of Cat-CVD deposited a-SiC:H as diffusion barrier layer on low-k HSQ films for ULSI

Sunil Kumar Singh, Alka A. Kumbhar, Mayur Kothari, R.O. Dusane
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Volume:
501
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2005.07.215
File:
PDF, 257 KB
english, 2006
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