Potential of Cat-CVD deposited a-SiC:H as diffusion barrier layer on low-k HSQ films for ULSI
Sunil Kumar Singh, Alka A. Kumbhar, Mayur Kothari, R.O. DusaneVolume:
501
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2005.07.215
File:
PDF, 257 KB
english, 2006