Evolution of hydrocarbon species on a silicon surface...

Thin Solid Films 2006 Vol. 506-507; Iss. none

Evolution of hydrocarbon species on a silicon surface during methane plasma investigated by in-situ infrared spectroscopy

Masanori Shinohara, Teruaki Katagiri, Keitaro Iwatsuji, Hiromichi Shibata, Yoshinobu Matsuda, Hiroshi Fujiyama
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Volume:
506-507
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2005.08.143
File:
PDF, 147 KB
english, 2006
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