Deposition of ZnO film using an open-air cold plasma...

Thin Solid Films 2006 Vol. 506-507; Iss. none

Deposition of ZnO film using an open-air cold plasma generator

Yoshifumi Suzaki, Seiki Ejima, Tomokazu Shikama, Shunryo Azuma, Osamu Tanaka, Takahiro Kajitani, Hideomi Koinuma
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Volume:
506-507
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2005.08.166
File:
PDF, 213 KB
english, 2006
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