Mesostructured thin films deposited by PECVD from TMGe

Mesostructured thin films deposited by PECVD from TMGe

P. Kazimierski
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Volume:
495
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2005.08.197
File:
PDF, 150 KB
english, 2006
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