Dry etching of LaNiO3 thin films using inductively coupled plasma
Gwan-Ha Kim, Dong-Pyo Kim, Kyoung-Tae Kim, Chang-Il Kim, Cheol-In Lee, Tae-Hyung KimVolume:
506-507
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2005.08.232
File:
PDF, 226 KB
english, 2006