Multi-technique characterization of tantalum oxynitride...

Multi-technique characterization of tantalum oxynitride films prepared by reactive direct current magnetron sputtering

S. Venkataraj, H. Kittur, R. Drese, M. Wuttig
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
514
Year:
2006
Language:
english
Pages:
9
DOI:
10.1016/j.tsf.2005.08.320
File:
PDF, 808 KB
english, 2006
Conversion to is in progress
Conversion to is failed