Ge diffusion and solid phase epitaxy growth to form Si1 − xGex/Si and Ge on insulator structure
Fei Gao, S.J. Lee, S. Balakumar, Anyan Du, Yong-Lim Foo, Dim-Lee KwongVolume:
504
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2005.09.043
File:
PDF, 367 KB
english, 2006