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Analysis of structure and defects in thin silicon films deposited from hydrogen diluted silane
G. van Elzakker, V. Nádaždy, F.D. Tichelaar, J.W. Metselaar, M. ZemanVolume:
511-512
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2005.12.133
File:
PDF, 292 KB
english, 2006