Analysis of structure and defects in thin silicon films...

Analysis of structure and defects in thin silicon films deposited from hydrogen diluted silane

G. van Elzakker, V. Nádaždy, F.D. Tichelaar, J.W. Metselaar, M. Zeman
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Volume:
511-512
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2005.12.133
File:
PDF, 292 KB
english, 2006
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