Effect of Si content in SiGe islands on the critical size...

Effect of Si content in SiGe islands on the critical size for shape evolution

Ning Deng, Peiyi Chen
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Volume:
513
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2006.01.020
File:
PDF, 246 KB
english, 2006
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