Thermo-mechanical evolution of multilayer thin films: Part...

Thin Solid Films 2007 Vol. 515; Iss. 6

Thermo-mechanical evolution of multilayer thin films: Part II. Microstructure evolution in Au/Cr/Si microcantilevers

David C. Miller, Cari F. Herrmann, Hans J. Maier, Steven M. George, Conrad R. Stoldt, Ken Gall
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Volume:
515
Year:
2007
Language:
english
Pages:
17
DOI:
10.1016/j.tsf.2006.01.045
File:
PDF, 3.05 MB
english, 2007
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