Small angle X-ray scattering measurements of porous low-k...

Thin Solid Films 2006 Vol. 515; Iss. 4

Small angle X-ray scattering measurements of porous low-k films using synchrotron radiation

Takashi Suzuki, Kazuhiko Omote, Yoshiyasu Ito, Ichiro Hirosawa, Yoshihiro Nakata, Iwao Sugiura, Noriyoshi Shimizu, Tomoji Nakamura
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Volume:
515
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2006.05.012
File:
PDF, 396 KB
english, 2006
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