The versatility of hot-filament activated chemical vapor...

Thin Solid Films 2006 Vol. 515; Iss. 3

The versatility of hot-filament activated chemical vapor deposition

Lothar Schäfer, Markus Höfer, Roland Kröger
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Volume:
515
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2006.07.073
File:
PDF, 1.94 MB
english, 2006
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