A heating and diffusion barrier based on TaSiNx for...

Thin Solid Films 2006 Vol. 515; Iss. 3

A heating and diffusion barrier based on TaSiNx for miniaturized IC devices

Huai-Yu Cheng, Yi-Chen Chen, Chain-Ming Lee, Shuo-Hung Wang, Tsung-Shune Chin
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Volume:
515
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2006.07.091
File:
PDF, 1.43 MB
english, 2006
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