High-performance polycrystalline silicon thin-film...

Thin Solid Films 2006 Vol. 515; Iss. 3

High-performance polycrystalline silicon thin-film transistors with oxide–nitride–oxide gate dielectric and multiple nanowire channels

Shih-Ching Chen, Ting-Chang Chang, Po-Tsun Liu, Y.C. Wu, C.C. Tsai, T.S. Chang, Chen-Hsin Lien
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Volume:
515
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2006.07.093
File:
PDF, 703 KB
english, 2006
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