Tuning of electrical and structural properties of indium oxide films grown by metal organic chemical vapor deposition
Ch.Y. Wang, V. Cimalla, H. Romanus, Th. Kups, M. Niebelschütz, O. AmbacherVolume:
515
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2006.11.079
File:
PDF, 635 KB
english, 2007