Tuning of electrical and structural properties of indium...

Tuning of electrical and structural properties of indium oxide films grown by metal organic chemical vapor deposition

Ch.Y. Wang, V. Cimalla, H. Romanus, Th. Kups, M. Niebelschütz, O. Ambacher
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Volume:
515
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2006.11.079
File:
PDF, 635 KB
english, 2007
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