Deposition by magnetron sputtering and characterization of indium tin oxide thin films
A.V. Mudryi, A.V. Ivaniukovich, A.G. UlyashinVolume:
515
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2006.11.113
File:
PDF, 417 KB
english, 2007