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Effect of pressure and substrate temperature on the deposition of nano-structured silicon–carbon–nitride superhard coatings by magnetron sputtering
S.K. Mishra, Chander Shekhar, P.K.P. Rupa, L.C. PathakVolume:
515
Year:
2007
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2006.11.167
File:
PDF, 909 KB
english, 2007