Deposition of dielectrics using a matrix distributed...

Thin Solid Films 2007 Vol. 515; Iss. 19

Deposition of dielectrics using a matrix distributed electron cyclotron resonance plasma enhanced chemical vapor deposition system

R. Botha, B. Haj Ibrahim, P. Bulkin, B. Drévillon
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
515
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2006.11.184
File:
PDF, 470 KB
english, 2007
Conversion to is in progress
Conversion to is failed