Characterization of iridium oxide thin films deposited by...

Thin Solid Films 2007 Vol. 515; Iss. 18

Characterization of iridium oxide thin films deposited by pulsed-direct-current reactive sputtering

Sachin Thanawala, Daniel G. Georgiev, Ronald J. Baird, Gregory Auner
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Volume:
515
Year:
2007
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2007.02.090
File:
PDF, 791 KB
english, 2007
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