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Influence of the reactive N2 gas flow on the properties of rf-sputtered ZnO thin films
Jinzhong Wang, Vincent Sallet, François Jomard, Ana M. Botelho do Rego, Elangovan Elamurugu, Rodrigo Martins, Elvira FortunatoVolume:
515
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2007.03.062
File:
PDF, 544 KB
english, 2007