Catalytic CVD processes of oxidizing species and the...

Thin Solid Films 2008 Vol. 516; Iss. 5

Catalytic CVD processes of oxidizing species and the prevention of oxidization of heated tungsten filaments by H2

Hironobu Umemoto, S.G. Ansari, Takashi Morimoto, Shota Setoguchi, Hitoshi Uemura, Hideki Matsumura
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Volume:
516
Year:
2008
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2007.06.041
File:
PDF, 182 KB
english, 2008
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