Electronic properties of low temperature microcrystalline...

Thin Solid Films 2008 Vol. 516; Iss. 5

Electronic properties of low temperature microcrystalline silicon carbide prepared by Hot Wire CVD

Stefan Klein, Arup Dasgupta, Friedhelm Finger, Reinhard Carius, Torsten Bronger
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Volume:
516
Year:
2008
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2007.06.056
File:
PDF, 223 KB
english, 2008
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