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Electrical characterization of amorphous silicon carbide thin films deposited via polymeric source chemical vapor deposition
T. Fanaei, N. Camiré, C. Aktik, S. Gujrathi, M. Lessard, Y. Awad, E. Oulachgar, M. ScarleteVolume:
516
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2007.06.072
File:
PDF, 780 KB
english, 2008