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Influence of microwave annealing on direct bonded silicon wafers
T.L. Alford, T. Tang, D.C. Thompson, S. Bhagat, J.W. MayerVolume:
516
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2007.06.118
File:
PDF, 386 KB
english, 2008