Evaluation of corrosion resistance of SiCN films deposited...

Evaluation of corrosion resistance of SiCN films deposited by HWCVD using organic liquid materials

T. Nakayamada, K. Matsuo, Y. Hayashi, A. Izumi, Y. Kadotani
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Volume:
516
Year:
2008
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2007.06.184
File:
PDF, 250 KB
english, 2008
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