Evaluation of corrosion resistance of SiCN films deposited by HWCVD using organic liquid materials
T. Nakayamada, K. Matsuo, Y. Hayashi, A. Izumi, Y. KadotaniVolume:
516
Year:
2008
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2007.06.184
File:
PDF, 250 KB
english, 2008