Effect of the oxygen flow on the properties of ITO thin films deposited by ion beam assisted deposition (IBAD)
Li-Jian Meng, Jinsong Gao, R.A. Silva, Shigeng SongVolume:
516
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2007.07.071
File:
PDF, 719 KB
english, 2008