Influence of bias voltages on the structure and wear...

Thin Solid Films 2008 Vol. 516; Iss. 16

Influence of bias voltages on the structure and wear properties of TiSiN coating synthesized by cathodic arc plasma evaporation

Chi-Lung Chang, Chao-Te Lin, Pi-Chuen Tsai, Wei-Yu Ho, Da-Yung Wang
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Volume:
516
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2007.07.087
File:
PDF, 1.53 MB
english, 2008
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