Under-layer behavior study of low resistance Ta/TaNx...

Thin Solid Films 2008 Vol. 516; Iss. 16

Under-layer behavior study of low resistance Ta/TaNx barrier film

Yu-Sheng Wang, Chi-Cheng Hung, Wen-Hsi Lee, Shih-Chieh Chang, Ying-Lang Wang
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
516
Year:
2008
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2007.07.104
File:
PDF, 473 KB
english, 2008
Conversion to is in progress
Conversion to is failed