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Surface morphology and growth mechanisms for sputtered amorphous silicon nitride thin films
Lihua Yu, Junhua Xu, Shirun Dong, Isao KojimaVolume:
516
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2007.07.158
File:
PDF, 2.31 MB
english, 2008